From the Wires
Dow Unveils First CMP Polishing Pads from its IKONIC™ Platform; Brings New, Advanced Materials to the Semiconductor Market
By: Business Wire
Feb. 1, 2013 09:43 AM
Following the introduction of its IKONIC™ chemical mechanical planarization (CMP) polishing pad platform in late 2012, Dow Electronic Materials, a business unit of The Dow Chemical Company (NYSE:DOW), today launched the first pads from its new IKONIC™ 2000 and IKONIC™ 3000 polishing pad series. All pads in the IKONIC CMP polishing pad platform are designed for use at the 28nm manufacturing node and below, with IKONIC 2000 polishing pads targeting copper barrier, HKMG and buffing applications, and IKONIC 3000 polishing pads developed initially for use in bulk copper polishing.
“We are setting a new benchmark in performance with the launch of the first pads from our new IKONIC pad platform,” said Colin Cameron, CMP global marketing director for Dow Electronic Materials. “The new technology used in Dow’s IKONIC polishing pads will support our customers’ ever-evolving technical requirements demanded by their most advanced processes.”
The first of the new pads, IKONIC 2020H, achieves defectivity levels significantly lower than traditional pads while maintaining removal rate. Additionally, every pad in the IKONIC 2000 series is formulated to be easily conditioned for optimal texture and longer pad life time. This improves polishing consistency and lowers overall cost of ownership.
IKONIC 3040M is the first polishing pad in the IKONIC 3000 series. This pad delivers a significant reduction in scratch defects compared to other bulk copper pads. Additionally, IKONIC 3040M demonstrates improved topography performance and lower cost of ownership. This pad is available in a range of configurations and options for multiple applications.
“While the IKONIC 2020H and IKONIC 3040M pads are being introduced today, additional pads are in active development in each series that are designed to address a myriad of customer specific requirements. Our IKONIC platform combines a unique set of chemistries with flexible design density, thus allowing us to offer our customers a wide range of customized solutions,” said Cameron.
Samples are currently available and in beta testing with multiple customers.
Dow (NYSE: DOW) combines the power of science and technology to passionately innovate what is essential to human progress. The Company connects chemistry and innovation with the principles of sustainability to help address many of the world's most challenging problems such as the need for clean water, renewable energy generation and conservation, and increasing agricultural productivity. Dow's diversified industry-leading portfolio of specialty chemical, advanced materials, agrosciences and plastics businesses delivers a broad range of technology-based products and solutions to customers in approximately 160 countries and in high growth sectors such as electronics, water, energy, coatings and agriculture. In 2011, Dow had annual sales of $60 billion and employed approximately 52,000 people worldwide. The Company's more than 5,000 products are manufactured at 197 sites in 36 countries across the globe. References to "Dow" or the "Company" mean The Dow Chemical Company and its consolidated subsidiaries unless otherwise expressly noted. More information about Dow can be found at www.dow.com.
About Dow Electronic Materials
Dow Electronic Materials, a global supplier of materials and technologies to the electronics industry, brings innovative leadership to the semiconductor, interconnect, finishing, photovoltaic, display, LED and optics markets. From advanced technology centers worldwide, teams of talented Dow research scientists and application experts work closely with customers, providing solutions, products and technical service necessary for next-generation electronics. These partnerships energize Dow's power to invent. Its key end-use applications include a broad range of consumer electronics from personal computers, to television monitors, smart phones and tablets and other mobile devices as well as electronic devices and systems used in a variety of industries. More information about Dow Electronic Materials can be found at http://www.dowelectronicmaterials.com
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